| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbd7eb2e3a76b55013b3156a0375ecd5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2200-0637
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2200-0685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2312-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L77-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-388 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a7121b89ade8bb4f685c269d2aad64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1289a403b58b7baaf2bad81e9c80db31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adfcbea1c6b96a8af24eb8cba7839d6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_230fdf4d15ff1fa87195aae260c5d23e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14bebbd936c53805e7de3050a0c4819a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaf29471677a35789326ba0d85e2b94d |
| publicationDate |
2019-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019169415-A1 |
| titleOfInvention |
Composition and molded article |
| abstract |
The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against oxygen plasma exposure and fluorine plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a hyperbranched polymer of a cage silsesquioxane with a specific structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10640637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019177527-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781002-B2 |
| priorityDate |
2016-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |