| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf213be03285a0b93967ae2fd2fd351a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2018-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3e819c5ceb0a16dd9c32cf886f1e9e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f3ed913a3066b7675ac9cf3d8d56e04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db14cc5fccfc110893ec463030f58053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be24288dc7e13b78f651cb92ae270dda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ec5bbfdd6dc4a53a16f97eafe97b88c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffeaaddaa100f0c21e6069d3802d3b1c |
| publicationDate |
2019-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019077993-A1 |
| titleOfInvention |
Polishing slurry composition |
| abstract |
Disclosed is a chemical-mechanical polishing slurry composition having a small change in pH over time under an acidic condition and thus being easy to store for a long time. The chemical-mechanical polishing slurry composition includes an abrasive; an amount of about 0.000006 to 0.01 weight % of an aluminum component based on the total weight of the polishing slurry composition; and water. The number of silanol groups on a surface of the abrasive and a content of the aluminum component satisfy the requirements of following Equation 1: n 0.0005≤( S*C )*100≤4.5, [Equation 1]n wherein, S is the number of the silanol groups present on 1 nm 2 of the abrasive surface (unit: number/nm 2 ), and C is the content of the aluminum component (weight %) in the slurry composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492513-B2 |
| priorityDate |
2016-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |