| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00 |
| filingDate |
2017-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3da245984185c752ee62935ace589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b48957c5b83ada781b5ec6d3f98557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ca8df0f7e88f59f2c1b45d44676cf4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3cfe05256c93c43bddba85a6ca31d36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9dc3158aad85c13756bd4974e763de9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e049ffbccc9d8548c4830a7d30b54a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41b1f57cd45fff2149f4a1f1492eeb94 |
| publicationDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019074173-A1 |
| titleOfInvention |
Water-Repellent Protective Film Forming Agent, Liquid Chemical for Forming Water-Repellent Protective Film, and Wafer Cleaning Method |
| abstract |
Disclosed are a water-repellent protective film forming agent for forming a water-repellent protective film on a silicon element-containing surface of a wafer and a water-repellent protective film forming liquid chemical in which the water-repellent protective film forming agent is dissolved in an organic solvent, characterized in that the water-repellent protective film forming agent consists of at least one kind of silicon compound selected from the group consisting of a sulfonimide derivative represented by the following general formula [1], a sulfonimide derivative represented by the following general formula [2] and a sulfonmethide derivative represented by the following general formula [3]. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021122925-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447642-B2 |
| priorityDate |
2016-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |