| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06N20-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06N20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06N7-01 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06N20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-5009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06N99-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06N99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate |
2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd2914217d408f3d5702f2675f2ed70c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de812c86a080f671c9ea8303d95885cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11af088ebe7eafcf0931893d49224e3c |
| publicationDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019072482-A1 |
| titleOfInvention |
Systems and methods for combining optical metrology with mass metrology |
| abstract |
A metrology system for substrate processing includes an optical metrology station including a plurality of optical sensors to measure spectra from a plurality of measurement locations on a substrate. A plurality of fiber cables are connected to the plurality of optical sensors. A spectrometer is selectively connected to the plurality of fiber cables. A mass metrology station measures at least one of a mass or mass change of the substrate. A controller includes a modelling module to generate thickness values at the plurality of measurement locations based on the spectra from the plurality of measurement locations and a learned model. A spatial modelling module generates a spatial thickness distribution model for the substrate based on the thickness values at the plurality of measurement locations from the modelling module and the at least one of the mass or the mass change from the mass metrology station. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I792370-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11709477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021030833-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022165593-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023101983-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022005916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11353364-B2 |
| priorityDate |
2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |