| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd4720aefb28835b9bfc5ff805f891b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0163
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5684 |
| filingDate |
2018-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ad645e5c1e4a2d425b2331ff15d7e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5587316a30ac0480bc7a05e0c9c15c70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d207f867e7e839471a26febfe1b45d64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0394ca6315ae8ec229cb6c3054b247a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13181333db4db91c9ef54086667725b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2b05990a3087df2a8f39056ddd1487 |
| publicationDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019072388-A1 |
| titleOfInvention |
High quality factor mems silicon hinge and slot-cut resonator for a vibratory gyroscope |
| abstract |
A resonant structure comprising at least two coaxial rings, wherein adjacent coaxial rings have adjacent peripheries and are attached together by a plurality of connection structures regularly arranged along said adjacent peripheries; and wherein a first ring has a first ring portion with a first radial thickness and a second ring, portion, in a vicinity of a first connection structure, with a second radial thickness smaller than said first radial thickness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11299981-B2 |
| priorityDate |
2017-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |