http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019052247-A1

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filingDate 2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f39299483bc1db4d105ffa61ff5a4c2
publicationDate 2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019052247-A1
titleOfInvention Unreleased plane acoustic wave resonators
abstract Unreleased plane acoustic wave (PAW) resonators are disclosed. An example unreleased PAW resonator includes a substrate, a first acoustic reflector disposed on the substrate, and a piezoelectric layer disposed on the first acoustic reflector, wherein the first acoustic reflector and the piezoelectric layer are unreleased from the substrate.
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Total number of triples: 28.