http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019041757-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccfee51074117c6961593015b14f0dd9 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2017-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecec36108c5a44e4283b046bea71387c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5101af4de97d10db3998d588e9e27890 |
| publicationDate | 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2019041757-A1 |
| titleOfInvention | Surface treatment composition and surface treatment method of resist pattern using the same |
| abstract | [Problem] To provide a surface treatment composition having excellent coating properties and also having capabilities of improving heat resistance of a resist pattern and of making a resist pattern less soluble in a solvent; a resist pattern-surface treatment method using the composition; and a resist pattern formation method using the composition. [Solution] The present invention provides a surface treatment composition comprising a solvent and a polysiloxane compound soluble in the solvent. A silicon atom which is constituent atom of the polysiloxane connects to a nitrogen-substituted hydrocarbon group provided that the silicon atom directly binds to a carbon atom in the hydrocarbon group. The invention also provides a resist pattern-surface treatment method using the composition and a resist pattern formation method using the composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670969-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019204747-A1 |
| priorityDate | 2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.