| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-2836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-1204 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-18 |
| filingDate |
2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4174756c792c628621f2bbb2054ac12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64324923e6c958e90773312ee1e7a7da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_329111f54daee655939cba86fca214ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_766fbbc3fb61efca4ea93ffc69b52069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdca149611726cfc468308bd18c9199d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6937b946f21f450cf98de3f7dfe26d8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a3eb8a2cddfca0a1fa4e51549d32e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c40c69ad38aed91dbed3a046d6f5ae6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90c9372eddd2b319efed7685e0769111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c5780c688bb5bc6c76f86ec411d6273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_598c5dcd795a3bb44614a8a76ca9788f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30daf44da1db91970387269e830fe2c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7b3eafe5718afc7bddd4fa517bdea4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22f5cb03f172dc72f6e00d2c27b9ef9d |
| publicationDate |
2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019041266-A1 |
| titleOfInvention |
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology |
| abstract |
A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11156548-B2 |
| priorityDate |
2017-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |