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publicationDate 2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019025271-A1
titleOfInvention Chemically robust miniature gas sensors
abstract A miniature gas sensing device includes a silicon-based substrate embedded with multiple first heating elements. A number of electrodes are disposed on the silicon-based substrate. A gas-sensing layer covers the electrodes. A porous or mesoporous adsorbent layer selectively filters components of a gas mixture other than a target gas and allows the target gas to reach the gas-sensing layer. The first heating elements are operable to periodically regenerate sensing capabilities of at least the gas-sensing layer.
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