Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4008e4a2500d9673afd2464a1915a70b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-007 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
filingDate |
2018-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1d1f7095514bad48ba52d97223bf4d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e054e2aa8d30e8e581df0766b2d4dabd |
publicationDate |
2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019025271-A1 |
titleOfInvention |
Chemically robust miniature gas sensors |
abstract |
A miniature gas sensing device includes a silicon-based substrate embedded with multiple first heating elements. A number of electrodes are disposed on the silicon-based substrate. A gas-sensing layer covers the electrodes. A porous or mesoporous adsorbent layer selectively filters components of a gas mixture other than a target gas and allows the target gas to reach the gas-sensing layer. The first heating elements are operable to periodically regenerate sensing capabilities of at least the gas-sensing layer. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021156733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020225527-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11375920-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11616255-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019033243-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110357606-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11730391-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158885-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11614432-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10682072-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10436731-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11399737-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112087693-A |
priorityDate |
2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |