| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3310ea86f3c492f6c09d7be6592866d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 |
| filingDate |
2018-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58683977861fdd9b91da7e99717e7c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16431e6a9f1fd80a535b3bc909321863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcf7a609dfee87b125b7ed84f3b8917f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d2ac3e3a75ad87036428554077c9a58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_711b4f20f733033c73b7bbced49864d4 |
| publicationDate |
2018-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018351533-A1 |
| titleOfInvention |
Acoustic resonator and method for fabricating the same |
| abstract |
An acoustic resonator includes a membrane layer disposed on an insulating layer; a cavity formed by the insulating layer and the membrane layer; a resonating portion disposed on the cavity and having a first electrode, a piezoelectric layer, and a second electrode stacked thereon; a protective layer disposed on the resonating portion; and a hydrophobic layer formed on the protective layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7343991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11777467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111245395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020169246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021126610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251772-B2 |
| priorityDate |
2017-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |