http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018330990-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2018-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c29f453808fe9a6e10cd2122be801a5 |
publicationDate | 2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-2018330990-A1 |
titleOfInvention | Method of processing workpiece |
abstract | A method of processing a workpiece with a cutting blade, the workpiece having a body of metal disposed in superposed relation to projected dicing lines, including: a first metal burr removing step of moving the cutting blade through first cut grooves while the cutting blade is positioned at such a height that a lowermost end of the cutting blade is lower than an upper end of the body of metal; and a second metal burr removing step of moving the cutting blade through the second cut grooves while the cutting blade is positioned at such a height that the lowermost end of the cutting blade is lower than the upper end of the body of metal. A liquid containing an organic acid and an oxidizing agent is supplied to the workpiece in the first metal burr removing step and the second metal burr removing step. |
priorityDate | 2017-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 135.