| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-02 |
| filingDate |
2018-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbeb8c00c912f1c49b5c21c3315eff65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_452237ddafdf804f6076f6b6958c4aae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02c58f1af33fb33c39f05a6a788649a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a28be4c6c0409a44c20912bbeffeeda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e14528382bfe606ed11783f9abc08b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f396b4f27c8002cbc097e83ef57af661 |
| publicationDate |
2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018328790-A1 |
| titleOfInvention |
Substrate processing apparatus, and thermocouple |
| abstract |
A thermocouple includes: a temperature measuring portion configured to measure an internal temperature of a reaction tube; a main body portion provided therein with a wire which constitutes the temperature measuring portion; and a cushioning portion attached to the main body portion at least in the vicinity of the temperature measuring portion, wherein the thermocouple is fixed to an outer surface of the reaction tube in a state in which the thermocouple makes contact with the reaction tube through the cushioning portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109554530-A |
| priorityDate |
2015-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |