Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32853 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32853 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02 |
filingDate |
2018-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65fd983793de83404fb384d54a27a25f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4efb466fa2c02b8be3289f70ce1520 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d9d6ff89134e5749141a863b7dc6d2b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7344aa3bb20f38f0625950e08ef91f0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a59c52e18be37bc3574065d5de7ffa72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6700654df0f17e209be2ab02283299f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef86f5c96483a8d2581aae3b4058e0c1 |
publicationDate |
2018-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2018318890-A1 |
titleOfInvention |
Conditioning chamber component |
abstract |
An apparatus for conditioning a component of a processing chamber is provided. A tank for holding a megasonic conditioning solution is provided. A mount holds the component immersed in a megasonic conditioning solution, when the tank is filled with the megasonic conditioning solution. A megasonic conditioning solution inlet system delivers the megasonic conditioning solution to the tank. A megasonic transducer head comprises at least one megasonic transducer to provide megasonic energy to the megasonic conditioning solution, wherein the megasonic energy is delivered to the component via the megasonic conditioning solution. A megasonic conditioning solution drain system drains the megasonic conditioning solution from the tank at a location above where the component is held in the megasonic conditioning solution. An actuator moves the megasonic transducer head across the tank. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11086233-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021333715-A1 |
priorityDate |
2017-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |