abstract |
Embodiments of the invention include a semiconductor structure and a method of making such a structure. In one embodiment, the semiconductor structure comprises a first fin and a second fin formed over a substrate. The first fin may comprise a first semiconductor material and the second fin may comprise a second semiconductor material. In an embodiment, a first cage structure is formed adjacent to the first fin, and a second cage structure is formed adjacent to the second fin. Additionally, embodiments may include a first gate electrode formed over the first fin, where the first cage structure directly contacts the first gate electrode, and a second gate electrode formed over the second fin, where the second cage structure directly contacts the second gate electrode. |