http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018306681-A1

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filingDate 2018-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018306681-A1
titleOfInvention Air particle measurement apparatus and clean environment equipment
abstract [Problem] To provide an air particle measurement apparatus and clean environment equipment capable of accurately measuring particles in air even when measuring particles in air having a high humidity. n [Solution] An air particle measurement apparatus connected to a chamber that is temporarily or constantly maintained at a humidity higher than an outside air humidity, includes: a measurement unit configured to measure particles in the drawn gas; a suction pipe through which the gas drawn from an interior of the chamber is transported to the measurement unit, the suction pipe connecting a mounting unit of the chamber and the measurement unit; a pump configured to suction the gas so as to be transported from the chamber to the measurement unit through the suction pipe; and a heating unit configured to heat the gas in a path upstream from the measurement unit.
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priorityDate 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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