| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49f04b1dc6b9fcc2d8b159c5ebee364b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1446 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 |
| filingDate |
2018-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_867f294a66c53101fc87a45c51552f46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac2c8d672c2f6c791eba0952a6a0a96c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2922a4043cd06c7838bd2b243b5f5a2f |
| publicationDate |
2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018286899-A1 |
| titleOfInvention |
Method of manufacturing optical semiconductor device |
| abstract |
A method of manufacturing an optical semiconductor device includes preparing a semiconductor substrate having a plurality of photoelectric conversion parts, forming a trench in the semiconductor substrate to separate the plurality of photoelectric conversion parts from each other, forming a boron layer on an inner surface of the trench by a vapor phase growth method, and forming an accumulation layer in the semiconductor substrate along the inner surface of the trench by performing a thermal diffusion treatment on the boron layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10771664-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019174033-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10658410-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11545513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11570387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069733-B2 |
| priorityDate |
2017-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |