| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7405c8c600d1d4c9bd348a3e56997a5f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32963 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32ce01eec64b271d375dde3c0ae5fec1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e1d61cbbcc955ce852d4f4f390172b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d29f21276f07b7dd69a4de03e150dcd2 |
| publicationDate |
2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018286768-A1 |
| titleOfInvention |
Methods for optical endpoint detection using an endpoint booster |
| abstract |
Plasma etching a semiconductor wafer in a vacuum etch chamber includes transmitting an optical signal through an aperture in an endpoint booster that is coupled to a vacuum side of the vacuum etch chamber, analyzing the optical signal to determine an endpoint of the plasma etch process, ending the plasma etch process when the optical signal reaches a first threshold, and cleaning the viewport when the optical signal is below a second threshold. The endpoint booster inhibits process byproducts from accumulating on the viewport during the plasma process, which increases the time between chamber cleanings. The reduction in chamber downtime for cleaning increases production throughput. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022015999-A1 |
| priorityDate |
2014-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |