| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16152
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1350b5313572c85c30673d51f629cc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50b8ee8350a5dd409fe6395b6b66fb7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b0f4ec57642a044c705a7c4f33c664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7403dda8e84272d9bd1e015d402e9b59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdc00925ee5fc21497aee33f6e953ef |
| publicationDate |
2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018244515-A1 |
| titleOfInvention |
Resiliently mounted sensor system with damping |
| abstract |
A MEMS device comprises a sensor system that is resiliently mounted on a carrier by means of spring elements. The air gap between sensor system and carrier is reduced by a damping structure present on one of facing surfaces of sensor system and carrier. The spring elements are at least partially accommodated within recesses of the damping structure. The height of the air gap is small enough to allow squeeze film damping. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11137253-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11505455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020207799-A1 |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |