http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018202042-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
filingDate 2016-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d117d833581daa345a09bcf4fe934f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43f3a1499a93e7bead91e37404700e7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c1fe16b4a3f4d36ede8bf75ce39c966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06936b6610957f8ad311af8f57521f28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04e7225b8626636cc346cc953ccbf1b0
publicationDate 2018-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018202042-A1
titleOfInvention Alkylamino-substituted halocarbosilane precursors
abstract Disclosed are Si-containing film forming compositions comprising alkylamino-substituted halocarbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10510852-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11708634-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019165112-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020023385-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018124431-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020119151-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11732350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832904-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840087-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11640978-B2
priorityDate 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521631
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16682930
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414777751
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2206
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045122
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327565
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045126
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454337942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405749
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433429043
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433429020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433429045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12608656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12209349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8471
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466451043
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426603164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419529444
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID46780460
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419553602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457953870
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457953871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457953872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85740641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452438996
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457991345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71347205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457991346
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457991347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099075
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466959503
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21584871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466966150
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57377124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457894083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431911544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7937
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457277700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409943
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099047
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154085707
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71332219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123390
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045132
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447528836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045133
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID377079155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045134
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10439
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045136
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045159
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045160
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2756737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227552018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327614
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID524190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226459332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154505271
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414008461
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457000845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154505272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226443003
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457004196
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61622
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154505273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457181954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045114
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168625
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416168946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458045116
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421297261

Total number of triples: 167.