| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2017-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c50d2c4f50376432902027dc2a129aed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b3fde0e1eab19f30b0ece8488038e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdc5f975be110fb6f7c4bb209354ad98 |
| publicationDate |
2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018187305-A1 |
| titleOfInvention |
Gas injection apparatus with heating channels |
| abstract |
A gas injection apparatus for a thermal processing chamber includes a gas injector having an inlet at a first end and a port at a second end; and a plate having a first opening matching the port, one or more second openings, and at least one circuitous flow path defined by the plate and fluidly connecting the first opening to the one or more second openings. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017304849-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020185198-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114197249-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10780447-B2 |
| priorityDate |
2017-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |