| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2c321c5b9b5774498f194d959bdf9df |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02118 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54 |
| filingDate |
2016-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7451e1cd160b15ecaf17484883dbcd62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b50837c2d47ddf1339b511981bff81d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20d5b383082e85ef6469731d3af69a51 |
| publicationDate |
2018-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018183405-A1 |
| titleOfInvention |
Bulk baw resonator having electrically insulating substrate |
| abstract |
A bulk acoustic wave (BAW) resonator is disclosed. The BAW resonator includes an electrically insulating substrate, and a first electrode disposed on and in direct contact with an upper surface of the electrically insulating substrate. A second electrode is disposed over a piezoelectric layer, which is disposed over the first electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023208383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111049490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022247902-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111082776-A |
| priorityDate |
2016-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |