| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62f941494409aea84f621977c5f0ab81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B5-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-04 |
| filingDate |
2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dd21a5301ac46ebe1b21afc9ca66904 |
| publicationDate |
2018-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018178227-A1 |
| titleOfInvention |
Systems and methods of electron beam induced processing |
| abstract |
Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714310-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/ES-2738911-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021067781-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018173484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020021149-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10438772-B2 |
| priorityDate |
2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |