| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-054 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate |
2017-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7cfda12052f01ff64719f9404f6be68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9311f676b03e30e0388f7cab1026e0f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8438ef8baf46044afb7f7cd5a64235db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_837344c4169e6bb671db27bdff821d01 |
| publicationDate |
2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018162720-A1 |
| titleOfInvention |
Mems package with roughend interface |
| abstract |
A method includes: providing a first substrate on which a plurality of first semiconductor devices is formed; providing a second substrate on which a plurality of second semiconductor devices is formed; and coupling the first and second substrates by contacting respective dummy pads of the first and second substrates, wherein at least one of the dummy pads of the first and second substrates comprises plural peaks and valleys. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11130671-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11505451-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020175500-A |
| priorityDate |
2016-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |