http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018155372-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9daca98ac07d1c93234d13f7306addb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2284
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
filingDate 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95e0a5dd8392acd8ecf7b6c9224bfdc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9b367ffee50f796e1dc0ab2de9de07c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdaf17e3a56bcafd5bde639cf76881ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0efb1a11becb759e6cff06a5b11b05aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0395e1d94acc75191dc725b7c42664c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_041e8684c586384d05d32d58f03d794f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb549196950664c81e2aaa9f31424943
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5669b6a1b8f85d66629e8e046d952e2c
publicationDate 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018155372-A1
titleOfInvention Tin compound, method of synthesizing the same, tin precursor compound for atomic layer deposition, and method of forming tin-containing material film
abstract A tin compound, tin precursor compound for atomic layer deposition (ALD), a method of forming a tin-containing material film, and a method of synthesizing a tin compound, the tin compound being represented by Chemical Formula (I): n n n n n n n n n n n n wherein R 1 , R 2 , Q 1 , Q 2 , Q 3 , and Q 4 are each independently a Cl to C4 linear or branched alkyl group.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110128373-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021375710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11643422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022402946-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10858379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11358975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112384639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I765767-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018334471-A1
priorityDate 2016-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226480355
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870841
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7937
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226427744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577456
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415806832
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23961
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12372
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577457
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161827978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11419
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8061
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226437551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452441329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158731258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862848
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448454896
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226398117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23988
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160236551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226441430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454092735
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393705
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157741096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID537440
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226430000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161922877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10994
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226499567
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157812107
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577482
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451769187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451794438
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449693299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426146796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416458
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23951
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458116183
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6328144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422904
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454175569
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417072
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554831
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5152226
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7802
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226428088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419489300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415158
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24408
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID807
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23424059
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42619
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12172
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448361131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406343
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870492
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226429999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583173
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8008
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434036
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416000411
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9570326
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226738424
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5463834
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225657
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393726
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522827
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554492
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454232550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410519838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12385
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226459332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160218634
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5182128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11549
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414868368
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405630
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454468409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415725167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357

Total number of triples: 188.