| abstract |
A method includes providing a starting structure, the starting structure including a semiconductor substrate, sources and drains, a hard mask liner layer over the sources and drains, a bottom dielectric layer over the hard mask liner layer, metal gates between the sources and drains, the metal gates defined by spacers, gate cap openings between corresponding spacers and above the metal gates, and a top dielectric layer above the bottom dielectric layer and in the gate cap openings, resulting in gate caps. The method further includes removing portions of the top dielectric layer, the removing resulting in contact openings and divot(s) at a top portion of the spacers and/or gate caps, and filling the divot(s) with etch-stop material, the etch-stop material having an etch-stop ability better than a material of the spacers and gate cap. A resulting semiconductor structure is also disclosed. |