http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018122632-A1

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publicationDate 2018-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018122632-A1
titleOfInvention Use of silyl bridged alkyl compounds for dense osg films
abstract Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same.
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