Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1033 |
classificationIPCInventive |
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filingDate |
2016-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca4871baff82c610077f78cb5adefd5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e08d91ff19fce642276d4cd68e163970 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc59c2b7300140f04f2b2bdffa8643a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_874f1daf4834cbc6e49bafa15ab3c8a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3e3e0e2a450375b8c45205fd01f1431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5ad48dc1266dcaa419573620030bca9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bad2092c5a51aa3974de136a70a1da0 |
publicationDate |
2018-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2018114833-A1 |
titleOfInvention |
Multiple-threshold nanosheet transistors |
abstract |
Semiconductor devices and methods of making the same include forming a stack of alternating layers of channel material and sacrificial material. The sacrificial material is etched away to free the layers of channel material. A gate stack is formed around the layers of channel material. At least one layer of channel material is deactivated. Source and drain regions are formed in contact with the at least one layer of active channel material. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828570-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022310851-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11715803-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022218536-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4199099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021408009-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4195286-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107886-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021407999-A1 |
priorityDate |
2016-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |