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publicationDate 2018-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018099916-A1
titleOfInvention Synthesis and use of precursors for vapor deposition of tungsten containing thin films
abstract Methods are provided for synthesizing W(IV) beta-diketonate precursors. Additionally, methods are provided for forming W containing thin films, such as WS 2 , WN x , WO 3 , and W via vapor deposition processes, such as atomic layer deposition (ALD) type processes and chemical vapor deposition (CVD) type processes. Methods are also provided for forming 2 D materials containing W.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021269915-A1
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