| abstract |
A piezoelectric device according to an embodiment comprises a piezoelectric thin film, a first electrode disposed on a first surface of the piezoelectric thin film, a substrate provided with an electrode pad, a plurality of pillar-shaped first supporting members provided between a second surface on an opposite side of the first surface of the piezoelectric thin film and the electrode pad of the substrate so as to fix the piezoelectric thin film onto the substrate, and a plurality of second electrodes electrically connected to the electrode pad from a part of the second surface of the piezoelectric thin film via a lateral surface of the first supporting member. The piezoelectric thin film, the first electrode, and the second electrodes compose a plurality of diaphragms each of which is a transducer element. The first supporting members are provided at locations at which the respective diaphragms are sectioned. The first electrode is provided in common to the diaphragms. |