| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2817954cd008bcd609a4c4eb49050be |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-734
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 |
| filingDate |
2015-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecb4c2a71180c2a6a61555ebfd19a6a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f379fcf9ad1d0aa558935859d04376d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8c813204ae2068709ffaf582541706c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38832c6e3f54b766ddab63db26abebc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9294733a7645df19656d327705df0365 |
| publicationDate |
2018-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018050959-A1 |
| titleOfInvention |
Fabrication of nanostructures in and on organic and inorganic substrates using mediating layers |
| abstract |
The present invention relates to a method for creating nanostructures in and on organic or inorganic substrates comprising at least the following steps: a) providing a primary substrate having a predetermined refractive index; b) coating the primary substrate with one or more mediating layers each having a predetermined refractive index different from that of the primary substrate, wherein the sequence of the layers is arranged so that a predetermined gradient of the refractive index is generated between the primary substrate and the uppermost layer of the one or more mediating layers; c) optionally coating the uppermost layer of the one or more mediating layers with an additional top layer; d) depositing a nanostructured etching mask onto the uppermost layer of the composite substrate obtained after steps a)-b) or a)-c); e) generating protruding structures, in particular conical or pillar structures, or recessed structures, in particular holes, in at least the uppermost layer of the composite substrate by means of reactive ion etching. A further aspect of the invention relates to a composite substrate with a nanostructured surface obtainable by said method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023157118-A1 |
| priorityDate |
2015-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |