| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43513eb3a10207e75536d0aa7adf0b7a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-14 |
| filingDate |
2016-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4f2f7e2793f1a89b6440f97dc4243af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c2c9b8d4ef3aa052fe52a108c67a087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17202e46a5afb5c244dd555836f3b2c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_813817a57158bc2701afed5a04021fce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64399542bedbb71d7af1f0223d35e406 |
| publicationDate |
2018-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018025897-A1 |
| titleOfInvention |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry |
| abstract |
Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018067062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10215719-B2 |
| priorityDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |