Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41791 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
filingDate |
2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eab04d970549ef9458baa933a5c4693c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21c2350ac620e700b913b7415f66fecb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_337c73316e986c8c90bc56901d0a2631 |
publicationDate |
2017-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2017373160-A1 |
titleOfInvention |
Sidewall protective layer for contact formation |
abstract |
A method for forming a semiconductor device comprises forming a sacrificial gate stack on a substrate, spacers adjacent to the sacrificial gate stack, and a source/drain region on the substrate. A first insulator layer is formed on the source/drain region. A portion of the first insulator layer is removed to expose portions of the spacers. Exposed sidewall portions of the spacers are removed to reduce a thickness of the exposed portions of the spacers. A protective layer is deposited over the exposed sidewalls of the spacers and a second insulator layer is deposited over the protective layer. The sacrificial gate is removed to expose a channel region of the substrate. A gate stack is formed over the channel region of the substrate. Exposed portions of the first insulator layer and the second insulator layer are removed to expose the source/drain region, and a conductive is formed on the source/drain region. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019210597-B4 |
priorityDate |
2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |