http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017362464-A1

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publicationDate 2017-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017362464-A1
titleOfInvention Use of a chemical mechanical polishing (cmp) composition for polishing of cobalt and / or cobalt alloy comprising substrates
abstract A chemical mechanical polishing (CMP) composition (Q) for chemical mechanical polishing of a substrate (S) containing (i) cobalt and/or (ii) a cobalt alloy, wherein the CMP composition (Q) contains: (A) Inorganic particles, (B) a substituted aromatic compound with at least one carboxylic acid function as corrosion inhibitor, (C) at least one amino acid, (D) at least one oxidizer, (E) an aqueous medium, wherein the CMP composition (Q) has a pH of from 7 to 10.
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priorityDate 2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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