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publicationDate 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017345822-A1
titleOfInvention Semiconductor devices and methods of fabricating the same
abstract Semiconductor devices may include a substrate, gate electrodes on the substrate, and source/drain regions at both sides of each of the gate electrodes. Each of the gate electrodes may include a gate insulating pattern on the substrate, a lower work-function electrode pattern that is on the gate insulating pattern and has a recessed upper surface, and an upper work-function electrode pattern that conformally extends on the recessed upper surface of the lower work function electrode pattern. Topmost surfaces of the lower work-function electrode patterns may be disposed at an equal level, and the upper work-function electrode patterns may have different thicknesses from each other.
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