http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017342304-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2f4c494e2833c66376bd0d313330114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b4d8cf0a4b2484b45a49f2c1fd3b13 |
| publicationDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017342304-A1 |
| titleOfInvention | Polishing composition |
| abstract | To provide a technique with which in a case where sulfonic acid-modified aqueous anionic sol is used as abrasive grain, in a polishing composition for polishing an object to be polished that contains SiN, the stability of the SiN polishing rate with time can be improved, and the content of hydrogen peroxide can be decreased. n In a polishing composition having a pH of 6 or less, sulfonic acid-modified colloidal silica obtained by immobilizing sulfonic acid on surfaces of silica particles, and water are allowed to be contained, at this time, as the sulfonic acid-modified colloidal silica, the one derived from sulfonic acid-modified aqueous anionic silica sol produced by a production method including a first reaction step of obtaining a reactant by heating raw colloidal silica having a number distribution ratio of 10% or less of microparticles having a particle diameter of 40% or less relative to a volume average particle diameter based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope in the presence of a silane coupling agent having a functional group chemically convertible to a sulfonic acid group; and a second reaction step of converting the functional group to a sulfonic acid group by treating the reactant is used. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11732190-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10647887-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020354632-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530335-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3737723-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499070-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017362465-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10570322-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019136197-A1 |
| priorityDate | 2015-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 199.