| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c19a91365ed494d9fe27d24190d4459f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02664 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E03B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E03B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-08 |
| filingDate |
2017-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18f22521ed064bd1f7ecd7cf039887a0 |
| publicationDate |
2017-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017335488-A1 |
| titleOfInvention |
Device including semiconductor substrate containing gallium nitride and method for producing the same |
| abstract |
A device includes a semiconductor substrate containing gallium nitride and having a crystal face inclined from 0.05° to 15° inclusive with respect to the c-plane. The semiconductor substrate includes an irregular portion on the crystal face, and the contact angle of pure water having a specific resistance of 18 MΩ·cm or more on the surface of the irregular portion is 10° or less. |
| priorityDate |
2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |