| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate |
2017-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fbd1a95bf10cbc8f3225757122e756c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3244bd6cbe3fe4a71ceb44fb1e518c1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_341dc86485d4ab18e1eae605a79dd860
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_915827967ebfbbedc9d556f8e7a8f367
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9df4b65420dea00e15f44de34b67f947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9b8099f6f003ec0519ceff6f524c793 |
| publicationDate |
2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017315085-A1 |
| titleOfInvention |
Backside CMOS Compatible BioFET With No Plasma Induced Damage |
| abstract |
The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a gate structure disposed on a first surface of a substrate and an interface layer formed on a second surface of the substrate. The substrate is thinned from the second surface to expose a channel region before forming the interface layer. |
| priorityDate |
2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |