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publicationDate 2017-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017307553-A1
titleOfInvention Mems-based calorimeter, fabrication, and use thereof
abstract A MEMS-based calorimeter includes a reference channel, a sample channel, and a thermopile configured to measure a temperature differential between the reference channel and a sample channel. The reference channel and the sample channel each include a passive mixer such as a splitting-and-recombination micromixer. The passive mixer can be formed by a first set of channels in a first layer and a second set of channels in a second layer. Methods for fabricating the MEMS-based calorimeter and methods of using the calorimeter to measure thermodynamic properties of chemical reactions are also provided.
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