http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017307438-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H9-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01H9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01H11-06 |
| filingDate | 2017-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_677e150e8f6d7bfeaee99cf67d193936 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eed47c8bfe5137a4a3519faa40206d4 |
| publicationDate | 2017-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017307438-A1 |
| titleOfInvention | Capacitance type transducer |
| abstract | A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode. |
| priorityDate | 2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID180504 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453983605 |
Total number of triples: 18.