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publicationDate 2017-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017298252-A1
titleOfInvention Nanoparticle based cerium oxide slurries
abstract A slurry for chemical mechanical planarization includes a surfactant, and abrasive particles having an average diameter between 20 and 30 nm and an outer surface of ceria. The abrasive particles are formed using a hydrothermal synthesis process. The abrasive particles are between 0.1 and 3 wt % of the slurry.
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