| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-938 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2016-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18bd5a8f122e2d33d662a40e667049fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb9cb03a7b774ea7c83b6b7007aac407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a480935f07b95db5a0e747a669634600 |
| publicationDate |
2017-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017294586-A1 |
| titleOfInvention |
Heterogeneous nanostructures for hierarchal assembly |
| abstract |
A method of making a carbon nanotube structure includes depositing a first oxide layer on a substrate and a second oxide layer on the first oxide layer; etching a trench through the second oxide layer; removing end portions of the first oxide layer and portions of the substrate beneath the end portions to form cavities in the substrate; depositing a metal in the cavities to form first body metal pads; disposing a carbon nanotube on the first body metal pads and the first oxide layer such that ends of the carbon nanotube contact each of the first body metal layers; depositing a metal to form second body metal pads on the first body metal pads at the ends of the carbon nanotube; and etching to release the carbon nanotube, first body metal pads, and second body metal pads from the substrate, first oxide layer, and second oxide layer. |
| priorityDate |
2016-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |