| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_404ad0935824c097ae3f26b606020534 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F214-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2017-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90aa0ec00fd0219c76b9aee0d6ea505a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0611c78483f1932315303dc4f86bd9e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_534c4bfda02ece73bc3fdce4dc09ba63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08fedb66a2239f616427991b0953cf80 |
| publicationDate |
2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017287694-A1 |
| titleOfInvention |
Photolithographic patterning of electronic devices |
| abstract |
A method of patterning a device includes forming a fluorinated photopolymer layer over a device substrate. The photopolymer layer has a lower portion proximate the device substrate and an upper portion distal the device substrate. The fluorinated photopolymer layer includes a radiation-absorbing dye and a fluorinated photopolymer having a solubility-altering reactive group. The photopolymer layer is exposed to patterned radiation to form exposed and unexposed areas in accordance with the patterned radiation and a developed structure is formed by removing unexposed areas using a developing agent that includes a first fluorinated solvent. The lower portion of the exposed area of the photopolymer layer has a dissolution rate in the developing agent that is at least 5 times higher than a dissolution rate for the upper portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021216014-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11111225-B2 |
| priorityDate |
2014-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |