| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02 |
| filingDate |
2017-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dc82427ca2119595032d7125111ca6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64a0f6767588d199d18479376571b549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a39ee5dd814a47d2b200013d69f55b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf54bf8086164aea3cd7ea6ef0c9cbf2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0d6f90a3fcd24a49424f26c18353bb7 |
| publicationDate |
2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017283970-A1 |
| titleOfInvention |
Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features |
| abstract |
Copper electroplating baths and methods enable the plating of photoresist defined megafeatures at high current densities which have substantially uniform morphology and reduced nodule development. The copper electroplating baths include a mixture of heterocyclic nitrogen containing copolymers which provide megafeatures having a good % TIR and % WID balance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021388519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11697884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018355502-A1 |
| priorityDate |
2016-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |