| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2017-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16188c77e1e30468857aca46f3dcf194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_855bc6c2798b52adac4beb0a2cfcc34a |
| publicationDate |
2017-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017271179-A1 |
| titleOfInvention |
Substrate support assembly having metal bonded protective layer |
| abstract |
A method of manufacturing a substrate support assembly comprises bonding a ceramic body to a thermally conductive base. The method further comprises metal bonding a protective layer to the ceramic body, wherein the protective layer is a sintered ceramic article. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022093974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679885-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769683-B2 |
| priorityDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |