| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2017-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca10679f399ed7bf6f9b126006dc8e27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27da3ccc42fbc89faba73d8c5707b9a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16188c77e1e30468857aca46f3dcf194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2245c87837d400259992de4164c047b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e99a9ebb8384707d4671f95cdf402322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866d78920275f4cce2953f68cc40d94e |
| publicationDate |
2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017250100-A1 |
| titleOfInvention |
Electrostatic chuck having thermally isolated zones with minimal crosstalk |
| abstract |
A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to a lower surface of the ceramic puck. The thermally conductive base includes a plurality of thermal zones and a plurality of thermal isolators that extend from the upper surface of the thermally conductive base towards a lower surface of the thermally conductive base, wherein each of the plurality of thermal isolators provides approximate thermal isolation between two of the plurality of thermal zones at the upper surface of the thermally conductive base. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I690012-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794464-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108682635-A |
| priorityDate |
2013-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |