http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017231097-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8401bd1a86a10d5508942a53475fc38 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0796 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00539 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0088 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate | 2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95c668e336aeb99755a9fb49742859d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aed91c4f904010a0456f1d7aba657d1 |
| publicationDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017231097-A1 |
| titleOfInvention | Desmear module of a horizontal process line and a method for separation and removal of desmear particles from such a desmear module |
| abstract | A desmear module for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container connectable to a desmear unit, a pump and at least a first liquid connection element for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level is provided inside the desmear module, which is above an intake area of the pump; wherein the desmear module further comprises at least a first liquid area, at least an adjacent second liquid area comprising the intake area of the pump, and at least a first separating element arranged between said at least first liquid area and said at least second liquid area. |
| priorityDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.