| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-01 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2016-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7cfda12052f01ff64719f9404f6be68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72bcc2c8cbd75b8de3dd2e7c8215360c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9311f676b03e30e0388f7cab1026e0f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fa59ae3c071efc967596023d9f1f6c2 |
| publicationDate |
2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017225948-A1 |
| titleOfInvention |
Preconditioning to enhance hydrophilic fusion bonding |
| abstract |
A method for fusion bonding a pair of substrates together with silane preconditioning is provided. A surface of a first oxide layer or a surface of a second oxide layer is preconditioned with silane. The first and second oxide layers are respectively arranged on first and second semiconductor substrates. Water is applied to the surface of the first or second oxide layer. The surfaces of the first and second oxide layers are brought in direct contact. The first and second oxide layers are annealed. A method for manufacturing a microelectromechanical systems (MEMS) package using the fusion bonding is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I796659-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11655146-B2 |
| priorityDate |
2016-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |