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publicationDate 2017-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017213726-A1
titleOfInvention Acetylide-Based Silicon Precursors And Their Use As ALD/CVD Precursors
abstract Provided are acetylide-based compounds and methods of making the same. Also provided are methods of using said compounds in film deposition processes to deposit films comprising silicon. Certain methods comprise exposing a substrate surface to a acetylide-based precursor and a reactant in various combinations.
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