http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017210006-A1

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filingDate 2017-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61bc6b34f1b6e19146752087067a372b
publicationDate 2017-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017210006-A1
titleOfInvention Irradiation apparatus, pattern irradiation apparatus, and system
abstract An irradiation apparatus includes a light source unit to emit light, a light condenser, disposed on a light path of the light emitted from the light source unit, to condense the light emitted from the light source unit, a first diffuser, disposed on a light path of the light exiting from the light condenser, to diffuse the light condensed by the light condenser, an optical equalizer, disposed downstream of the first diffuser, to equalize a luminance distribution of the light entering the optical equalizer from the first diffuser and to output the light having the equalized luminance distribution, and a second diffuser, disposed downstream of the optical equalizer, to diffuse the light exiting from the optical equalizer.
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Total number of triples: 31.