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filingDate 2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ac026e38b67510523bc43c2ab3bff54
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publicationDate 2017-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017197822-A1
titleOfInvention Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
abstract Membrane transducer structures and thin-film encapsulation methods for manufacturing the same are provided. In one example, the thin film encapsulation methods may be implemented to co-integrate processes for thin-film encapsulation and formation of microelectronic devices and microelectromechanical systems (MEMS) that include the membrane transducers.
priorityDate 2014-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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